纳米离散Cr晶核辅助低表面粗糙度电铸脱模研究-《集美大学学报（自然科学版）》

文章信息/Info

Title:: Study on Assisting Low Surface Roughness Demolding of Electroforming by Cr Nano-Discrete Nuclei

作者:: 陈菊1; 杨光1; 李月2; 蔡佳旺3; （1.集美大学海洋装备与机械工程学院，福建厦门，361021；2.合肥工业大学材料科学与工程学院，安徽合肥，230009；3. 福建夜光达科技股份有限公司，福建泉州 362200）

Author(s):: CHEN Ju1; YANG Guang1; LI Yue2; CAI Jawang3; (1.School of Marine Equipment and Mechanical Engineering, Jimei University, Xiamen 361021, China;2. School of Materials Science and Engineering, Hefei University, Hefei 230009, China;3. Fujian Yegood Technology Co., Ltd., Quanzhou 362200, China)

Keywords:: optical thin film; anti-sticking layers; demoulding strength; discrete nuclei; surface roughness

摘要:: 为了解决无机脱模剂重铬酸钾对于环境的污染问题,降低光学模具精密电铸脱模后的表面粗糙度，探讨通过还原三价铬，形成纳米Cr离散晶核界面，实现精密电铸脱模的方法。利用计时电流法测试Cr的电流时间曲线，根据Scharifker-Hills理论模型确定Cr在铜电极上的瞬时成核行为，并探讨Cr离散晶核密度和脱模强度之间的关系；通过正交实验得到影响形核密度的主次因素；通过对比Cr离散晶核和重铬酸钾辅助脱模后Ni模具的表面粗糙度和Cu模具的使用次数，证实纳米离散Cr晶核对重铬酸钾的可替代性。实验结果表明：1）通过改变Cr离散晶核的密度可以调节Cu/Ni界面的粘附强度；2）对比重铬酸钾辅助脱膜技术，Cr离散晶核能够实现定量控制界面结合力，有效降低脱膜后模具的表面粗糙度，并提高母模具的使用次数，同时减小六价Cr的毒性。

Abstract:: In order to solve the environmental pollution problem of inorganic release agent potassium dichromate and to reduce the surface roughness of optical moulds after precision electroforming. In this paper, the method of precise electroforming demoulding is studied by reducing trivalent chromium and forming discrete nano Cr nuclei. The current-time curve of Cr was tested by chronoamperometry, and the instantaneous nucleation behavior of Cr on copper electrodes was determined according to the Scharifker-Hills theoretical model. The relationship between Cr discrete nuclei density and demoulding strength was discussed. The primary and secondary factors affecting the nucleation density were obtained through orthogonal experiments.The substitutability of nano-discrete Cr nuclei for potassium dichromate was confirmed by comparing the surface roughness of Ni molds and the times of use of Cu molds after Cr discrete nuclei and potassium dichromateassisted mold release.The experimental results show that:1) the adhesion strength of the Cu/Ni interface can be adjusted by changing the density of Cr discrete nuclei;2) For potassium chromate assisted demoulding technology,Cr discrete nuclei can achieve quantitative control of interface bonding force, effectively reduce the surface roughness of the mold after demoulding, and increase the number of use of the original mold,while reducing the toxicity of hexavalent Cr.